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SCA103T-D04
SCA103T Series Data Sheet THE SCA103T DIFFERENTIAL INCLINOMETER SERIES The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing elements plus they can withstand mechanical shocks of 20000 g. Features Measuring ranges ±15° SCA103T-D04 and ± 30° SCA103T-D05 0.001° resolution (10 Hz BW, analog output) Sensing element controlled over damped frequency response (-3dB 18Hz) Robust design, high shock durability (20000g) Excellent stability over temperature and time Common mode error and noise reduction using the differential measurement principle Single +5 V supply Ratiometric analog voltage outputs Digital SPI inclination and temperature output Comprehensive failure detection features o True self test by deflecting the sensing elements’ proof mass by electrostatic force. o Continuous sensing element interconnection failure check. o Continuous memory parity check. RoHS compliant Compatible with Pb-free reflow solder process Applications Platform leveling and stabilization Rotating laser levels Leveling instruments Construction levels 12 VDD Sensing element 1 Signal conditioning and filtering 11 OUT_1 A/D conversion 10 ST_1 9 ST_2 Self test 1 Self test 2 EEPROM calibration memory Temperature Sensor 1 SCK SPI interface 3 MISO 4 MOSI 7 CSB Sensing element 2 Signal conditioning and filtering 5 OUT_2 6 GND Figure 1. Murata Electronics Oy www.muratamems.fi Functional block diagram Subject to changes Doc.Nr. 8261700 1/17 Rev.A3
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