SCA103T Series
Data Sheet
THE SCA103T DIFFERENTIAL INCLINOMETER SERIES
The SCA103T Series is a 3D-MEMS-based single axis inclinometer family that uses the differential measurement
principle. The high calibration accuracy combines extremely low temperature dependency, high resolution and low
noise together with a robust sensing element design, to make the SCA103T an ideal choice for high accuracy
leveling instruments. The Murata inclinometers are insensitive to vibration due to having over damped sensing
elements plus they can withstand mechanical shocks of 20000 g.
Features
Measuring ranges ±15° SCA103T-D04 and
± 30° SCA103T-D05
0.001° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
Excellent stability over temperature and time
Common mode error and noise reduction
using the differential measurement principle
Single +5 V supply
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o
True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o
Continuous sensing element interconnection
failure check.
o
Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Applications
Platform leveling and stabilization
Rotating laser levels
Leveling instruments
Construction levels
12 VDD
Sensing
element 1
Signal conditioning
and filtering
11 OUT_1
A/D conversion
10 ST_1
9 ST_2
Self test 1
Self test 2
EEPROM
calibration
memory
Temperature
Sensor
1 SCK
SPI interface
3 MISO
4 MOSI
7 CSB
Sensing
element 2
Signal conditioning
and filtering
5 OUT_2
6 GND
Figure 1.
Murata Electronics Oy
www.muratamems.fi
Functional block diagram
Subject to changes
Doc.Nr. 8261700
1/17
Rev.A3
